High spatial resolution energy dispersive X-ray spectrometry in the SEM and the detection of light elements including lithium

  • 2013
  • May

Simon Burgess, Xiaobing Li, and James Holland

Oxford Instruments NanoAnalysis, High Wycombe, UK

Monday, June 24, 2013 - 10:15

Current technology for energy-dispersive X-ray spectrometry using silicon-drift detectors in combination with the latest field-emission scanning electron microscopes delivers routine nanoscale characterisation of structures as small as 50 nm. This performance relies on a combination of high spectral resolution and large sensor area. Results from the latest developments in low-noise electronics and windowless detectors show the possibility of analysing structures down to 10 nm and the sensitive detection of light elements, including, for the first time, lithium.

Microscopy and Analysis 27(4) May 2013

Download articlehttp://www.microscopy-analysis.com/sites/default/files/2013_May_Burgess.pdf

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